Effects of operating parameters on the decomposition of C2F6 in a mixture with N2were investigated in an atmospheric pressure plasma. A stretching of the Lissajous pattern and increase in intensity of voltage/current were results of the voltage variation, while the variation of frequency induced a major stretch of current intensity, and maintained the Lissajous pattern. Consumed power and conversion of C2F6 increased with the applied voltage/frequency, whereas a decrease in the total flow rate/initial C2F6 concentration led to high conversion of C2F6. A high-energy efficiency was obtained at a low applied frequency and a high initial C2F6concentration.

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